How ASML Builds a $150 Million EUV Machine

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ASML is a critical supplier of semiconductor  lithography machinery for foundries like Intel and   TSMC. In my video discussing TSMC's $28 billion  capital expenditure, I briefly discussed their   situation. Their CEO said in an earnings call that  they can make 50 high-end EUV lithography machines   a year. That's it. Without those machines,  the foundries cannot churn out more 5nm chips. So why not make more of these machines?  ASML itself has thousands of suppliers   making parts that end up into its machines.  Coordinating and integrating all of these parts   together into a single smooth-running  machine is immensely challenging. In this brief video, we will continue our deep  dive into ASML and look at how the company puts   together centi-million dollar lithography machines  for multi-billion dollar semiconductor companies.   And how EUV makes it so much harder. You might want to watch my ASML explainer  video first before starting on this one,   just in case you need a refresher. ASML is a global, sprawling company  - befitting the nature of its work.   The factory is based in the  Netherlands but there are   additional manufacturing and R&D sites  located in Connecticut and California. Its products are more like airplanes than you  might at first expect. In my video about COMAC,   I mentioned that Boeing and Airbus no longer  make the majority of the parts that they put   together. Instead they have evolved into having  a system integrator role where they select,   procure, and put together the outputs  of different suppliers in their network. ASML is the same. Their lithography machines,  like those of the TWINSCAN variety, are built   out of independent modules. Kind of  like the Megazord in Power Rangers. 90% of the components that go into these modules  are made by the 500-600 outside companies   within ASML's outsourced supplier network. These  are extremely critical companies and differentiate   ASML's supplier network from its competitors  Canon and Nikon, which tend to do things in-house. 300 of these suppliers are  located in the Netherlands.   Another 100 are in other parts of Europe,  mostly Germany. And the rest are largely   in the United States. Coordinating  within this global network is critical. Just as TSMC leans heavily on ASML to provide  training and advice on how to use their products,   ASML in turn leans heavily on its suppliers  on how to best use their components.   For instance, their strategic alliance  with German company Carl Zeiss AG. Zeiss is a specialist in precision optics and  helps produce the lens - a very critical part. So why outsource? Isn’t that the reason  why Boeing can’t make good stuff anymore?   Isn’t outsourcing a scourge of western capitalism? Well, ASML might from time to time purchase  a supplier company to bring critical, unique   expertise in-house. For instance, the acquisition  of Brion Technologies, a US firm specializing in   computational lithography, and Cymer, another  US firm specializing in lasers. It happens. But for the most part, ASML wants to remain  in a system integrator role and leave as   much of the actual manufacturing to its  suppliers. There are a few reasons for this. First, ASML can get its module components without  needing to learn how to be the best in the world   in making that specific part. A single lithography  stepper can incorporate over 1,600 individual   components. 200 of those are not cheap to  procure in terms of cost or production time. The company cannot focus on those components'   minutiae while at the same time  maintaining a big picture view. Second, this allows ASML the flexibility to  change and adapt themselves to changing technology   trends. If something happens and ASML has to  radically change the way it creates its machines,   like as it did with EUV, then it has the  flexibility to make that change - without having   to deal with the sunk cost of having invested  resources to develop a now-defunct technology. Third, like with Boeing and Airbus, ASML wants  the system integrator role because it puts them   at the capstone of the entire massive  enterprise. The gateway that listens   to the customer requirements and has  final say on which part goes where. This role allows for the most economic value.  Indeed, ASML is often its suppliers’ single   most important customer. It might represent 50%  or more of their revenues (though this is not   the preferred situation). Thus, ASML can exercise  strong influence on their operations and planning. Many of these suppliers are too  specialized to diversify away from ASML.   How many customers are out there for  high-precision motors or a beam measuring unit? Okay, so now that we have a good  idea of what the supplier network is,   let us look at how it works. At least, this  is how it worked as of the past few years.   Might have changed a bit since then. This  is the latest information that I have. It starts with the client. Intel, Samsung,  or TSMC plan out their future customer and   product demand. They need to do this a year or  more ahead of time, which can be challenging.   They inform ASML that they would like to  purchase a machine to meet this demand   and when they would like  this machine to be delivered. When making that order, the client chooses  from over 30 client-specific options,   crafting the end product to meet their own  needs. This means that no single machine   that ASML puts out is exactly the same  as the other. It also explains why TSMC,   Intel and Samsung can get different  results despite sharing the same supplier. Once ASML knows that it has an order,  their Supply Chain Planning Department   makes a Master Production Schedule. This MPS  clarifies when production for this specific,   individual machine starts and ends.  It takes into account resource needs,   available workforce hours, component lead times,  and of course, customer deadlines. After that,   the suppliers are notified and issued  purchase orders to get working. As I explained earlier, each  machine is made up of modules.   These modules are built independently in a process  step referred to within the company as "ASSY". The   modules then are integrated together in a step  called "FASY" (standing for "Final Assembly"). After FASY, the machine is tested to see  whether or not it meets internal benchmarks.   Configurations may be made to help improve  performance. This stage is called "Test". Once the machine is determined to have met  ASML standards for performance and reliability,   the machine is disassembled and  packed for delivery to the customer.   Over 80% of ASML's customers are located in  Asia, so this often will be a long flight. Once it gets to its destination,  ASML’s technicians work with the   foundry’s technicians to install the  device into a fab clean room for use.   It is a harrowing, delicate process. If you  want to know more about how foundries build   and set up such rooms, I recommend watching  my video about TSMC’s fab construction work. ASML not only has to build and deliver the  product, but they also are responsible for   its upkeep and service time. It is not like a  refrigerator where they set it up and go home. ASML signs service contracts with its foundry  customers after the sale with uptime KPIs.   Such arrangements are normal for large  capital purchases between companies.   These service contracts can hold ASML financially  liable for lost sales due to machine downtime. So the company offers 24/7 support coverage  with trained technicians and staff.   These come out of their local technology  development and training sites in Japan,   Korea, Taiwan, United States, and 16  additional countries around the world. When things do break, it is critical that spare  parts go out to customers ASAP. The company keeps   spare parts at local service warehouses. If a  customer needs something that the local warehouse   does not have, then the central warehouse has  to ship it over, with a target date of 14 days. Better than having fast turnaround on replacing  broken parts is to have them not break in the   first place. To do this, ASML maintains  rigid quality control standards on their   suppliers - a policy of "zero defects". Each  part is closely inspected on the factory floor   and if anything can go wrong, then it is rejected. ASML's supply chain in action is a  symphony of chaos and nervous tension.   Their planners have to account for parts being  rejected on the factory floor due to defects,   possible disruptions, and transport issues. If a rejected or missing part is not all that  important, then workers can find a workaround -   usually by replacing the item with a "dummy  part" - and continue on schedule. But if the   part is mission-critical, then production can stop  entirely and the whole module can be put at risk. It is totally understandable from the  supplier's perspective that things can   go wrong. It happens. But ASML has to deliver  a machine to its customers by the deadline.   And a foundry like TSMC does  not want to have to go to Apple   and tell them their iPhone has to be  delayed due to insufficient capacity. Furthermore, some of these parts - usually the  lens and lasers - need a lot of lead time. Longer   than the actual lead time of the final product.  A single lens can take up to 40 weeks to be made.   This means that some of the work needs to be  started far in advance of actual customer orders.   So it is not like you can ring that up  overnight even with all the money in the world. Ah yes. Money. I have not mentioned  cost yet, but that matters too.   Part of the reason why it can cost $18  billion to build a new leading edge fab   has to do with the rising costs of  the latest lithography equipment.   EUV equipment can cost $150 million each, as much  as a Boeing airplane. Individual components and   replacements for those machines often cost  far in excess of a million dollars each. Oh, since we mentioned EUV ... Extreme Ultraviolet Lithography is the most  advanced lithography technology available today.   Its commercialization with the TWINSCAN NXE series   is expected to be more cost-effective  than other techniques for sub-10nm nodes. The technology has been around  since the 1980s. I have done a   video about it earlier if you  want to learn more about that.   I won't repeat myself recounting the long  journey. So let’s get into some gritty details. EUV lithography requires a re-engineering of many  traditional semiconductor fabbing principles.   I have heard it described as a revolutionary,   rather than evolutionary technique  and I think that is about right.   ASML's entire supply chain has to be rejiggered  from the bottom up to accommodate these changes. Let me give you just one example of this in  action. A key challenge for EUV lithography   is how to make sure that you can etch  enough wafers in a given amount of time   while avoiding substantial yield defects.  But the EUV mirrors have relatively   low reflective-ness, less than 70%. So  they need a very powerful light source. They achieve this by firing a  CO2 laser at droplets of tin   in order to create clouds of  plasma and ultraviolet light. Why droplets? Because they need to reduce  the amount of tin debris from the plasma   so to prevent the contamination of the  mirrors collecting and focusing the light. At first they experimented with a rotating  cylinder, then they moved to a thin target tape,   and then a spray jet, and then a liquid filament,  before finally settling on tiny droplets. The margin of error when it comes to the  power source is really tight and this has   had consequences across the entire supply chain.  It is common in older lithography methods to use   something called a pellicle, a polymer film  just 1 micrometer wide, to prevent particles   from casting a "shadow" discrepancy that gets  projected onto the etched wafers and ruins them. In the EUV world, however, even the super thin  traditionally-used pellicles can absorb and weaken   the EUV light. So while ASML works to develop  a suitable pellicle, earlier generations of   EUV machines all across the supply chain now have  to adhere to ultra-strict cleanliness standards. A particle just 52 nm wide, the size of a small  virus, can contaminate the EUV supply component.   Maintaining such cleanliness pushes the  limits of what is technically possible.   New proprietary detectors were  installed at all supplier premises.   Particle flushing steps had to be added  throughout the whole build process. Such challenges are why EUV commercialization   was delayed for several decades even after  proving the feasibility of the science in the 80s. Note. It has recently been announced that  pellicles are now available for EUV machines.   So it is likely from now on that this cleaning  won’t need to be a part of the workflow.   But before that, such cleanliness  standards were enforced for a few years.   Having them now will improve  wafer yields and cost. ASML's market leadership in this  sector is defined in two ways. The first is in the technological superiority of  its products. ASML products are twice as expensive   as competing products from Nikon or Canon, but  perform much better than the competition. They   can print in more detail and at a higher rate.  That’s what the customers want more than price. The second has to do with its very  strong record of collaboration.   The company works closely with both  its customers and its suppliers,   conducting between all of them to deliver  a product as demanding as any airplane. This track record and constant  process improvement helps to keep ASML   at the leading edge of the market,  and Moore's Law humming along.
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Views: 427,401
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Length: 14min 52sec (892 seconds)
Published: Sun May 23 2021
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